MKS Instruments Inc. of Andover, Mass., today claimed a major U.S.-based chip manufacturer has chosen MKS’s Spectra products for process control in its first 300mm fab. MKS said the unnamed company ...
Andover, Mass.-based MKS Instruments Inc. has developed an in-situ sensor information system that provides fully automated monitoring of cluster tool vacuum environments, the company said today. The ...
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